Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator

Title: Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator
Creator: Fleming, Andrew J.
Relation: Review of Scientific Instruments Vol. 81, Issue 10, p. 103701-1-103701-4
Publisher Link: http://dx.doi.org/10.1063/1.3488359
Publisher: American Institute of Physics
Resource Type: journal article
Date: 2010
Description: Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hysteresis which can produce up to 14% uncertainty in the reproduced topography. In this work, a charge drive is used to linearize the vertical piezoelectric actuator which reduces the error from 14% to 0.65%.
Subject: scanning probe microscopes; piezoelectric actuator; vertical actuator; probe-sample
Identifier: http://hdl.handle.net/1959.13/923385
Identifier: uon:9720
Identifier: ISSN:0034-6748
Language: eng
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